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사업소개

  • NSM-Series

    Single Wafer Processor

    NSM-series is a single wafer processor that consists of 12 chambers and an advanced chamber structure & wafer transport module to improve small size particle control and throughput in the process application under 20nm technology node.

  • SI-Series

    Single Wafer Processor

    SI-series is a single wafer processor that consists of 8 chambers and an advanced wafer transport module to improve throughput in the process application under 30nm technology node.

  • SC-Series

    Wafer Scrubber

    SC-series is a stacked platform scrubber which consists of 8 chambers and an advanced wafer transport module to improve throughput in the process application under 20nm technology node.