NSM-series is a single wafer processor that consists of 12 chambers and an advanced chamber structure & wafer transport module to improve small size particle control and throughput in the process application under 20nm technology node.

SI-series is a single wafer processor that consists of 8 chambers and an advanced wafer transport module to improve throughput in the process application under 30nm technology node.

SC-series is a stacked platform scrubber which consists of 8 chambers and an advanced wafer transport module to improve throughput in the process application under 20nm technology node.